MEMS DEVICES:

MVD replaces traditional liquid coating processes with a highly reproducible vapor deposition alternative that is ideal for manufacturing applications.

Typical MEMS devices benefiting from MVD hydrophobic anti-stiction films include displays, sensors, actuators, RF switches, inkjets, and data storage devices. BioMEMS applications include wetting control in micro-fluidics (lab-on-a-chip, microplates), passivation on implantable devices, requiring biocompatible surface coatings, and devices requiring functionalized surface coatings.

MVD is also used for commercial applications requiring moisture barriers, anti-corrosion coatings, or release layers for imprinting.

Additional Papers:

"Surface Engineering Opportunities"
Micro Nano Systems, October 2007 by B. Kobrin

"Better MEMS, NIL with Surface Engineering"
Small Times, November 2007 by B. Kobrin

"Improved Vapor-phase Deposition Technique for Anti-stiction Monolayers"
Micromachining and Microfabrication, Proceedings of SPIE Vol. 5342, 2004 by R.Ashurst, C.Carraro, J.D. Chinn, V.Fuentes, B.Kobrin, R.Maboudian, R.Nowak, and R.Yi.

"Molecular Vapor Deposition - An Improved Vapor-Phase Deposition Technique of Molecular Coatings for MEMS Devices"
Semicon West-2004 SEMI Technology Symposium: Innovations in Semiconductor Manufacturing (STS: ISM) Invited Paper by Boris Kobrin, Victor Fuentes, Srikanth Dasaradhi, Richard Yi, Romuald Nowak, Jeff Chinn, Robert Ashurst, Carlo Carraro, Roya Maboudian.

"Molecular Vapor Deposition (MVD) - An Improved Vapor-Phase Deposition Technique of Molecular Coatings for MEMS Devices"
Semicon West-2004 SEMI Technology Symposium Powerpoint presentation.